Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film

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Surface and thickness measurement of a transparent film using wavelength scanning interferometry.

A wavelength scanning interferometer for measuring the surface and thickness of a transparent film has been studied. A halogen light source combined with an acousto-optic tuneable filter is used to generate a sequence of filtered light in a Linnik interferometer, which leads to a sequence of interferograms captured by a CCD camera. When a transparent thin film is measured, the reflection signal...

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ژورنال

عنوان ژورنال: Optics Express

سال: 2005

ISSN: 1094-4087

DOI: 10.1364/opex.13.010066